innovation highlight
Nano-Optics Measuring Machine (NOM)
Fivefold gain in accuracy for nanoscale optical components
Height deviations between 0 nm (blue) and 3 nm (red) of a plane grating substrate (100 x 20 mm) measured with the NOM
The main results of the project were optical components (plane gratings and aspherical mirrors) for synchrotron research with a fivefold higher accuracy than the state of the art, and a Nano- Optics Measuring Machine (NOM) with two different scanning deflectometry sensor systems, both disposing of an accuracy in the nm range.
Contact
Dr. Uwe Brand (Managing Director)
Phone: +49 (0)531 592-5111
Fax: +49 (0)531 592-695111
eMail: uwe.brand@ptb.de
CC UPOB (Ultra-precise Surface Figuring)
Physikalisch-Technische Bundesanstalt
Bundesallee 100
D-38116 Braunschweig
Source: CC UPOB
Print page
Back
