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Nanopositioning and nanomeasuring machine
The Nano Positioning and Nano Measuring Machine is used for the three-dimensional coordinate measurement in a range of 25 mm x 25 mm x 5 mm with a resolution of 0.1 nm. Its unique sensor arrangement provides Abbe error-free measurements on all three coordinate axes. The measuring object is placed directly on a movable mirror corner. The position of this mirror corner is monitored by the three fixed miniature interferometers. The mirror corner is positioned by a three axis electrodynamic driving system. Any angular deviations during the positioning process are measured and corrected by two angle sensors.
Nanopositionier- und messmaschine
The light of three stabilized lasers are guided from the electronics unit to the interferometer heads by fiberoptic lightguides, providing a compact, thermally stable set-up of the Nano Positioning and Nano Measuring Machine.
An optional contacting system acts as zero-indicator and is interchangeable. The probe sensors can be attached according to customers requirements, e.g. scanning tunnelling and scanning atomic force microscopes, autofocussing sensors, capacitive or inductive sensing systems.
The applications are very different: manipulation, processing and measurement of objects in the fields of micro-mechanics, microelectronics, optics, molecular biology and microsystems engineering with nanometric precision within a large range.
Contact:
SIOS Meßtechnik GmbH
Am Vogelherd 46
98693 Ilmenau
Tel.: 03677-64470, Fax: -64478
Email: info@sios.de
http://www.sios.de
Source: CC UPOB
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